中微公司 PRIMO D-RIE 刻蝕設備榮獲半導體國際2009年度主編推薦最佳產品獎
上海及舊金山2009年7月16日電 /美通社亞洲/ — 中微半導體設備有限公司的 PRIMODD-RIE 介電質刻蝕設備榮獲剛剛由半導體國際雜誌社頒布的2009年度主編推薦最佳產品獎。這一獎項是對在芯片生產上已被驗證的，並在推動國際半導體工業發展上具有極大潛力的傑出設備產品，材料及服務的高度認可。
中微公司資深副總裁，杜志游博士代表公司出席了在一年一度的 SEMICON WEST 期間的頒獎典禮。
提到這次的獲獎，中微公司的董事會主席和總執行長尹志堯博士說：「在今天的的市場環境下，一個企業在核心設備領域是否能處於領先地位，越來越取決於企業是否能夠通過技術創新來提供給市場最佳的性能和最具成本優勢的產品。中微的 PRIMO D-RIE 刻蝕設備正是按照這樣的使命而開發的。我們非常高興地看到我們的創新通過這個最具聲望的獎項而得到認可。」
從2007年年底進入市場以來，中微公司的 PRIMO D-RIE （超高射頻，去藕和離子反應刻蝕）設備已經穩步進入市場並被亞洲先進的芯片製造商用於關鍵的刻蝕應用。中微公司 PRIMO 刻蝕設備專注於300毫米65-45納米及更先進的器件製造， 中微公司 PRIMO D-RIE 獨特的雙工作台反應器技術保證了芯片加工的質量，芯片之間加工的一致性，設備加工的重複性和穩定性。 獨特的雙台多反應室系統大大提高了產能；尤其是與單工作台的系統相比產能提高35%，平均製造成本降低35%。正像中微承諾的，PRIMO D-RIE 以簡單的設計，優異的性能，和可靠好用的系統為工業界提供高性價比的產品。
中微公司簡介
中微公司是以亞洲為基地的新興半導體設備公司。公司致力於不斷的技術創新,極大的提高產能和降低晶片製造成本，為全球先進的晶片生產廠家提供一系列高端的生產設備。中微公司擁有獨立的技術創新能力和嚴格的知識產權管理。中微開發的超高頻,去耦合的離子蝕刻設備為65和45奈米以及更高端的器件製程技術提供了最佳的技術和低成本解決方案。中微公司的全球佈局包括在中國,日本,南韓,台灣, 新加坡等地設立研發, 製造,銷售和客戶服務機構。
如要獲取更多中微公司信息,歡迎登入中微公司網站： http://www.amec-inc.com 。
關於半導體國際雜誌
半導體國際致力於通過其優秀的產品和服務，其中包括雜誌，互聯網，數據分析，產品目錄以及展會指南，電子時事通訊和專門的增刊，基本的研究，行業的研討會，行業評選和先進的行業網站 http://www.semiconductor.net ，來為半導體工業的工程師和供應商提供專門的服務。半導體國際屬於全球最大的 B-B 信息提供者 REED ELSEVIER 的子公司，也是全球最大的特殊電子工業出版商。
AMEC’S Primo D-RIE(TM) Etch Tool Wins Semiconductor International 2009 Editors’ Choice Best Product Award
SHANGHAI and SAN FRANCISCO, July 16 /PRNewswire-Asia/ — At a ceremony today in San Francisco, Advanced Micro-Fabrication Equipment Inc. (AMEC) was honored with a 2009 Editors’ Choice Best Product Award for its PRIMO D-RIE(TM) dielectric etch tool by Semiconductor International Magazine. The award recognizes outstanding new products, materials and services-successfully proven in a manufacturing environment-with considerable potential to advance the global semiconductor industry.
AMEC’s senior vice president, Zhiyou Du, Ph.D., accepted the award which was presented at the annual SEMICON West tradeshow.
Commenting on the win, AMEC’s chairman and CEO, Gerald Z. Yin, Ph.D., noted, “In today’s environment, leadership in the capital equipment market is increasingly being determined by the ability to innovate solutions that deliver cutting-edge technical capabilities with optimized cost of ownership. Our PRIMO D-RIE etch tool was built to address these critical considerations and we’re very pleased to see its innovation validated by this prestigious Best Product award.”
Since its market introduction in late 2007, AMEC’s PRIMO D-RIE (very high RF frequency, de-coupled reactive ion etching) tool has been steadily adopted by leading chipmakers in Asia for critical etch applications. Built for 300-mm production of devices at 65-45 nm and beyond, the tool features proprietary technical innovations for superior on-wafer performance, precise matching between stations, and process robustness. A novel dual-station multi-chamber cluster architecture improves productivity by more than 35 percent when compared to single-station cluster systems. Cost of ownership is reduced by an average of 35 percent. The PRIMO D-RIE tool carries the AMEC promise of simple design, superior performance, ease-of-use, reliability and affordability.
About Advanced Micro-Fabrication Equipment Inc.
Advanced Micro-Fabrication Equipment Inc. (AMEC) is a leading Asia-based semiconductor equipment company with proprietary wafer fabrication solutions designed to advance technology, increase productivity and reduce manufacturing costs for leading global semiconductor manufacturers. Headquartered in the hub of the semiconductor manufacturing industry, AMEC’s systems combine unique technology solutions with economic innovations for the 65/45-nm nodes and beyond. The company maintains R&D, manufacturing, business and support operations in China, Japan, Korea, Singapore and Taiwan. To learn more, please visit http://www.amec-inc.com .
About Semiconductor International Magazine
Semiconductor International serves the needs of both semiconductor engineers and industry suppliers through a wide range of products and services, including magazines, webcasts, podcasts, directories, trade show guides, e-newsletters, specialized supplements, original research, industry seminars, industry awards, and the leading industry website, http://www.semiconductor.net . Semiconductor International is part of Reed Elsevier, the world’s largest provider of business-to-business information, and home of the world’s most extensive collection of specialized electronic industry publications.